Cyclic Olefin Resist Polymers and Polymerizations for Improved Etch Resistance.
نویسندگان
چکیده
منابع مشابه
Multiple Olefin Metathesis Polymerizations (MOMP)
Olefin metathesis polymerization, in particularly ring-opening metathesis polymerization (ROMP), has been a popular topic of modern research. Two other types are acyclic diene metathesis polymerization (ADMET) and cyclopolymerization of diynes. To date, there has been no report on a metathesis polymerization utilizing more than one metathesis process. Herein, the concept of multiple olefin meta...
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Novel cyclic olefin polymers (COPs) derived from bulky cyclic olefins, tricyclodipentadiene (TCPD) and tricyclo[6.4.0.19,12]-tridec-10-ene (TTE), with high glass transition temperature (Tg), excellent thermal stability, and high transparency, have been synthesized by ring-opening metathesis polymerization (ROMP) and subsequent hydrogenation. ROMP of TCPD and TTE was carried out successfully wit...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1999
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.12.501